Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage

By Ghader Rezazadeh, A. Tahmasebi, Mikhail Zubstov. 2006

236 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/0cda0da42196f2894384bed68371fe29c7079e6f