Ferroelectric thin films for micro-sensors and actuators: a review

By Paul Muralt. 2000

912 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/96cf93cb71a627828ad161e46f316b5c19876fcc

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In Biomedical Engineering

In Electrical and Electronic Engineering

In Materials Chemistry

Citations in the corpus

Modern Physics of Ferroelectrics: Essential Background (2007, background): “More details on these applications can be found in the review by Muralt [76].”
Theoretical modeling and nonlinear analysis of piezoelectric energy harvesting from vortex-induced vibrations (2014, background): “These vibration-based energy harvesters have been proposed to operate selfpowered devices including microelectromechanical systems and actuators (Muralt, 2000), health monitoring sensors and wireless sensors (Roundy and Wright, 2005), medical implants (Karami and Inman, 2012), and cameras…”
Physics of thin-film ferroelectric oxides (2005, background): “Some of the more important applications for ferroelectrics make use of their piezoelectric properties, for example in actuators and microsensors; this topic has been reviewed by Muralt (2000).”
Microscale acoustofluidics: Microfluidics driven via acoustics and ultrasonics (2011, background): “Although some of these methods have been around for years, the deposition of piezoelectric materials onto surfaces both suitable for actuation and compatible with microelectronics and microfluidics—silicon, for example—has only been possible in the past decade (Muralt, 2000; Wang et al., 2002).”
Processing, Structure, Properties, and Applications of PZT Thin Films (2007, background): “367 also reported that PZT films with (100) orientation yield superior piezoelectric properties compared with the (111) orientation.”
Micromachined infrared detectors based on pyroelectric thin films (2001, background): “For the latter the interested reader is referred to other reviews (for example, Muralt (2000)) and books (for example, Araujo et al (1996)).”
Piezoelectric MEMS sensors: state-of-the-art and perspectives (2009, background): “The higher electromechanical coefficient of PZT films makes it a very attractive material for microactuator and microsensor applications [1, 2, 13].”