Micromachined infrared detectors based on pyroelectric thin films

By Paul Muralt. 2001

254 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/4a355cd903390036f70a2f51aee0396827507709

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In Electrical and Electronic Engineering

1. Frank Niklaus

Citations in the corpus

• MEMS-based uncooled infrared bolometer arrays: a review (2007, background): “thermocouples [2], pyroelectric [3] and ferroelectric [4] uncooled infrared detectors.”