Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers

By Jinling Yang, Takahito Ono, Masayoshi Esashi. 2000

160 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/857d80067dda6c844c255080671fea0e40ec7434

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Harold S. Park
2. Patrick A. Klein
3. M. Imboden
4. P. Mohanty
5. P. Sharma
6. P. Chhapadia
7. P. Mohammadi
8. Ju Li

In Electrical and Electronic Engineering

1. Harold S. Park
2. M. Imboden
3. Patrick A. Klein
4. P. Mohanty

Citations in the corpus

• Dissipation in nanoelectromechanical systems (2014, background): “[172, 171,161,173], or chemical treatments [171,173,161,174] have proven to have significant effects on the quality factor, and improvements of over one order of magnitude have been reported.”
• Surface stress effects on the resonant properties of metal nanowires: The importance of finite deformation kinematics and the impact of the residual surface stress (2008, background): “We note that the present analysis was conducted on ideal, non-defective nanowires and thus did not consider factors that are known to deleteriously impact the resonant properties of nanostructures, including clamping losses, internal friction, surface losses and oxidation effects [10, 12, 61–67].”
• Temperature Dependence of Quality Factor in MEMS Resonators (2006, unknown): “An important result of this high temperature encapsulation step in the fabrication process is the annealing of the devices, which eliminates surface contaminations from native oxides, organic molecules, and absorbed waters as described in [29] and [31]; thus, the energy loss due to the surface effec”