3D microfabrication with inclined/rotated UV lithography

By Manhee Han, Woo-Hyuk Lee, Sung-Keun Lee, S. S. Lee. 2004

188 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/84e96232445de18355b16b666785d8b1ad8852e0

Citations in the corpus

• Polymers in conventional and alternative lithography for the fabrication of nanostructures (2011, unknown): “2c [27].”
• SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography (2007, unknown): “Tilted and rotated lithography [111], reprinted with permission, © 2004 Elsevier.”