Analytical model for analysis and design of V-shaped thermal microactuators

By Eniko T. Enikov, S. Kedar, Kalin V. Lazarov. Journal of microelectromechanical systems, 2005

148 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/5825e73ce7231589497fa6a0f2737831031a5e9c