Dynamics of MEMS resonators under superharmonic and subharmonic excitations

By Ali H. Nayfeh, Mohammad Ibrahim Younis. 2005

247 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/6fe715479bd3210688c7454386256493a0eefbb6

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In Atomic and Molecular Physics, and Optics

In Biomedical Engineering

In Electrical and Electronic Engineering

Citations in the corpus

Review of modeling electrostatically actuated microelectromechanical systems (2007, methodology): “Electrostatic force Parallel plate [93, 94] [90, 91] [95, 96] [12, 67, 16, 71] [15, 70, 84] — (cntd) [92, 60] [28, 97] [73, 76, 77] [86, 83, 85] Fringing fields [18, 78, 82, 23] [65, 72, 43] 3D analysis [25, 39] [87–89] [63, 74] [64]”
Nonlinear Dynamic Analysis of Electrostatically Actuated Resonant MEMS Sensors Under Parametric Excitation (2007, background): “Younis and Nayfeh [1], [4] and Abdel-Rahman and Nayfeh [14] used the method of multiple scales to study the response of an electrostatically actuated resonator to a primary resonance excitation [4], a superharmonic resonance excitation of order two [14], and a subharmonic resonance excitation of ord”
REDUCED-ORDER MODELS FOR MICROELECTROMECHANICAL RECTANGULAR AND CIRCULAR PLATES INCORPORATING THE CASIMIR FORCE (2008, methodology): “These devices are used in signal filtering, and chemical and mass sensing, see for example AbdelRahman et al. (2002), Nayfeh and Younis (2005), Rhoads et al. (2006), Tilmans and Legtenberg (1994b), Younis and Nayfeh (2003), Krylov and Maimon (2004), Kuang and Chen (2004), Xie et al. (2003).”
On the stability and extension of reduced-order Galerkin models in incompressible flows (2009, methodology): “Nayfeh and Younis [ 29 ] used this technique to locate stable and unstable limit cycles of a micro-electro-mechanical resonator excited around twice its fundamental natural frequency (subharmonic resonance of order one-half) and near half its fundamental natural frequency (superharmonic resonance of”
Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic Actuation (2010, background): “This is because dynamic actuation demands less voltage for pull-in compared to static methods [13], [29], [30].”