Recent progress in soft lithography

By John A. Rogers, Ralph G. Nuzzo. 2005

455 citations recorded by the source corpus.

The future of nanoscience and nanotechnology depends critically on techniques for micro- and nanofabrication. An emerging set of methods, known collectively as soft lithography, uses elastomeric stamps, molds, and conformable photomasks for patterning two- and three-dimensional structures with minimum feature sizes deep into the nanometer regime. The powerful patterning capabilities of these techniques together with their experimental simplicity make them useful for a wide range of applications. This article reviews recent progress in the field of soft lithography, with a focus on trends in research and steps toward commercialization.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Radiology, Nuclear Medicine and Imaging

View Paper: https://www.semanticscholar.org/paper/6ebc761e7bec230f618f0ac1c72db3790784e038

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In Biomedical Engineering

In Electrical and Electronic Engineering

In Radiology, Nuclear Medicine and Imaging

Citations in the corpus

Polymers in conventional and alternative lithography for the fabrication of nanostructures (2011, methodology): “Elastomers such as poly(dimethylsiloxane) or PDMS (for example, Sylgard 184, Dow Corning) are a versatile class of polymers for replication of the master [21].”
From Wearable Sensors to Smart Implants-–Toward Pervasive and Personalized Healthcare (2015, methodology): “These techniques have been used to successfully int egrate sensor electrodes with microfluidic devices in the micro-nano scale [45].”
A Review of Micromodels and Their Use in Two‐Phase Flow Studies (2012, unknown): “…and Gray, 1995; Pyrak-Nolte et al., 1988; Rangel-German and Kovscek, 2006; Stöhr et al., 2003; Sugii and Okamoto, 2004; Tallakstad et al., 2009; Lenormand and Zarcone, 1985a, 1985b; Lenormand, 1989a, 1989b; Lenormand et al., 1988; Sharma et al., 2011; Romano et al., 2011; Frette et al., 1997).”
Microfluidic lab-on-a-chip platforms: requirements, characteristics and applications. (2010, background): “Soft lithography is based on the use of elastomeric stamps, molds and conformable photomasks to fabricate and replicate microstructures [119].”
Technologies for Printing Sensors and Electronics Over Large Flexible Substrates: A Review (2015, background): “Properties which distinguish PDMS from rest of the elastomers include conformability to large area, deformable to conform onto nonplanar surfaces, elasticity for easy release, low surface free energy, chemical inertness, homogeneous, isotropic, optically transparent and durability for multiple uses ”