A Thermodynamic Approach to Selecting Alternative Gate Dielectrics

By Darrell Schlom, J. Haeni. 2002

294 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/674b459a377558d2365d1409577a3052fb9ec002

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. Uwe Schroeder
2. Thomas Mikolajick
3. I. Fina
4. Vincent Garcia
5. J. MacManus‐Driscoll
6. M. Lira-Cantú
7. B. Dkhil
8. G. Niklasson

In Materials Chemistry

1. Uwe Schroeder
2. Thomas Mikolajick
3. Vincent Garcia
4. Manuel Bibes
5. I. Fina
6. J. MacManus‐Driscoll
7. M. Lira-Cantú
8. B. Dkhil

Citations in the corpus

• Towards Oxide Electronics: a Roadmap (2019, background): “In light of this, growth of oxides on Si has been studied by many research groups in the past, but the progress has always been hindered by the problem of the materials' incompatibility, making epitaxial integration difficult [130].”