Characterization of the mechanical behavior of an electrically actuated microbeam

By Eihab M. Abdel-Rahman, Mohammad Ibrahim Younis, Ali H. Nayfeh. 2002

539 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/672d58e99c390769c900fa36aa2f228a66b9bda2

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

Citations in the corpus

Nonlinear vibration of nanotube-reinforced composite cylindrical panels resting on elastic foundations in thermal environments (2014, background): “Due to their very attractive thermo-mechanical properties, these new materials will arise as key components in Micro-Electro-Mechanical Systems (MEMS) and Nano-Electro-Mechanical Systems (NEMS) [1,2].”
Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic Actuation (2010, methodology): “In previous works [25]– [30], we presented analytical and computational methods, and reduced-order models (ROMs) to investigate the static and dynamic behaviors of straight microbeams under electrostatic and electric harmonic loads.”
Review of modeling electrostatically actuated microelectromechanical systems (2007, methodology): “The resonance frequencies, in general, do not monotonically decrease with an increase in the voltage applied between the two conductors [12, 82].”
Dynamic pull-in phenomenon in MEMS resonators (2007, background): “A key issue in the design of such a device is to tune the electric load away from the pull-in instability [4, 5 ], which leads to collapse of the microbeam and hence the failure of the device.”
Electromechanical Model of Electrically Actuated Narrow Microbeams (2006, unknown): “The shooting method used in [9] to solve nonlinear differential”
REDUCED-ORDER MODELS FOR MICROELECTROMECHANICAL RECTANGULAR AND CIRCULAR PLATES INCORPORATING THE CASIMIR FORCE (2008, methodology): “Multimode analysis on microbeams using a nonlinear beam equation has been done by Abdel-Rahman et al. (2002), Zhang and Zhao (2006), where the effect of the number of modes retained in the trial solution on its convergence is investigated.”