Electromechanical Model of Electrically Actuated Narrow Microbeams

By Romesh C. Batra, Maurizio Porfiri, Davide Spinello. Journal of microelectromechanical systems, 2006

231 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0285fd305d1026e496ef2203122072ecbde5bd89

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Romesh C. Batra
2. Maurizio Porfiri
3. Davide Spinello
4. Kalpataru Das

In Electrical and Electronic Engineering

1. Romesh C. Batra
2. Maurizio Porfiri
3. Davide Spinello
4. Kalpataru Das

Citations in the corpus

• Pull-in and snap-through instabilities in transient deformations of microelectromechanical systems (2009, background): “Even though, in [39] an initially flat beam is considered, for the present problem, the arch height is negligible as compared to its width and length, and neglecting fringing fields should not introduce an appreciable error in the pull-in parameters.”
• REDUCED-ORDER MODELS FOR MICROELECTROMECHANICAL RECTANGULAR AND CIRCULAR PLATES INCORPORATING THE CASIMIR FORCE (2008, methodology): “Linear micromembranes have been studied by Pelesko (2002), Pelesko et al. (2003), Pelesko and Chen (2003), Batra et al. (2006a).”
• Review of modeling electrostatically actuated microelectromechanical systems (2007, methodology): “Electrostatic force Parallel plate [93, 94] [90, 91] [95, 96] [12, 67, 16, 71] [15, 70, 84] — (cntd) [92, 60] [28, 97] [73, 76, 77] [86, 83, 85] Fringing fields [18, 78, 82, 23] [65, 72, 43] 3D analysis [25, 39] [87–89] [63, 74] [64]”