Secondary resonances of electrically actuated resonant microsensors

By Eihab M. Abdel-Rahman, Ali H. Nayfeh. 2003

153 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/6553fe210e235d3e2e43a5c2e3de9c014b74545e

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Romesh C. Batra
2. Maurizio Porfiri
3. Davide Spinello
4. Wenming Zhang
5. Guang Meng
6. Kalpataru Das

In Biomedical Engineering

1. Wenming Zhang
2. Maurizio Porfiri
3. Guang Meng
4. Romesh C. Batra
5. Davide Spinello
6. G. Nie

In Electrical and Electronic Engineering

1. Romesh C. Batra
2. Maurizio Porfiri
3. Davide Spinello
4. Wenming Zhang
5. Guang Meng
6. Kalpataru Das

Citations in the corpus

• Nonlinear Dynamic Analysis of Electrostatically Actuated Resonant MEMS Sensors Under Parametric Excitation (2007, methodology): “Electrical “feedthrough” is prevalent in many resonant MEMS sensors [14], [15].”
• Review of modeling electrostatically actuated microelectromechanical systems (2007, methodology): “Electrostatic force Parallel plate [93, 94] [90, 91] [95, 96] [12, 67, 16, 71] [15, 70, 84] — (cntd) [92, 60] [28, 97] [73, 76, 77] [86, 83, 85] Fringing fields [18, 78, 82, 23] [65, 72, 43] 3D analysis [25, 39] [87–89] [63, 74] [64]”