Large area dense nanoscale patterning of arbitrary surfaces
By Miri Park, P. Chaikin, R. Register, D. Adamson. 2001
144 citations recorded by the source corpus.
View Paper: https://www.semanticscholar.org/paper/63382b4fb85f73a670cbda139263b1daf50c9d99
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- Charles T. Black
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- Joy Y. Cheng
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- Ho-Cheol Kim
- Y. Zhang
Citations in the corpus
- Polymer self assembly in semiconductor microelectronics (2006, methodology): “Fabrication schemes using organic templates often incorporate oxide or nitride hardmask processes and two-step etch procedures in order to achieve sufficient contrast [48, 174].”
- Development of Patterns for Digital Image Correlation Measurements at Reduced Length Scales (2007, methodology): “One method applicable to nanoscale strain measurements is digital image correlation, which requires the presence of a randomly-patterned material surface [1–4].”