Hafnium and zirconium silicates for advanced gate dielectrics
By G. Wilk, Robert M. Wallace, J. Anthony. 2000
940 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering
View Paper: https://www.semanticscholar.org/paper/59ec5ef6221eab4a35be48aa02d303347c6549a5
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