Superconformal Electrodeposition of Copper

By Thomas P. Moffat, Daniel Wheeler, W. Huber, Daniel Josell. 2001

304 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/588b1e4212745c4178a03fa0142913bf81da66c8