Physical processes associated with the deactivation of dopants in laser annealed silicon

By Y. Takamura, Peter B. Griffin, James D. Plummer. 2002

133 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/4440063b0b92af156da619222fbad22c2dfa5ae7