GaAs metal–oxide–semiconductor field-effect transistor with nanometer-thin dielectric grown by atomic layer deposition

By Peide D. Ye, G. Wilk, B. Yang, J. Kwo, S. Chu, S. Nakahara, H. Gossmann, J. Mannaerts, M. Hong, K. Ng and 1 more. 2003

310 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/3f57c86fc6a1dd7f99ecd769e81b7ae4e40fe180