Electrical properties of high-κ gate dielectrics: Challenges, current issues, and possible solutions

By Michel Houssa, L. Pantisano, L. Ragnarsson, R. Degraeve, T. Schram, Geoffrey Pourtois, S. Gendt, G. Groeseneken, M. Heyns. 2006

267 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/3529530863b1450adb566f076f966d7879f53232