Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist

By M. Gnan, S. Thoms, D. Macintyre, R. Rue, M. Sorel. 2008

228 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Surfaces, Coatings and Films

View Paper: https://www.semanticscholar.org/paper/33c11e8aee512284ce4981f2cccb5212a2919bcc

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

In Surfaces, Coatings and Films

Citations in the corpus

Silicon-on-Insulator Spectral Filters Fabricated With CMOS Technology (2010, background): “Somewhat lower propagation losses have been reported using e-beam lithography [32], [33],”
Tunable Delay Lines in Silicon Photonics: Coupled Resonators and Photonic Crystals, a Comparison (2010, methodology): “The pattern was generated by e-beam lithography with proximity correction and stitching compensation to achieve low propagation losses, typically ranging from 1 to 3 dB/cm [ 6 ] and an accuracy better than 0.5 nm on the waveguide dimensions.”
On-chip quantum interference between silicon photon-pair sources (2013, background): “1 dB/cm, though much lower loss is possible[34].”
Slow Light Enhanced Nonlinear Optics in Silicon Photonic Crystal Waveguides (2010, background): “certainly compared with nanowires, which can exhibit effective lengths as long as 4 cm due to their lower loss [30], [31].”
Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography (2009, background): “Though low propagation loss photonic wires were reported using high resolution e-beam resist (HSQ) [1], a number of works have noted a degree of instability and irreproducibility issues in this material [8]–[10].”
Subnanometer Linewidth Uniformity in Silicon Nanophotonic Waveguide Devices Using CMOS Fabrication Technology (2010, background): “Recently tremendous progress has been made in reducing propagation loss and the loss of micro-bends [1], [2], [3].”
Compact Single-Mode Silicon Hybrid Rib/Strip Waveguide With Adiabatic Bends (2011, background): “The best stepper-fabricated monocrystalline silicon wires demonstrated have losses larger than 2 dB/cm [2], [13], [14], and with e-beam fabrication, it is 1 dB/cm [ 15 ].”
Non-Invasive On-Chip Light Observation by Contactless Waveguide Conductivity Monitoring (2014, unknown): “The waveguide pattern is written on a hydrogen silsesquioxane (HSQ) resist through electron-beam lithography and then transferred to the silicon core by an inductively coupled plasma etching process [17].”