Monocrystalline silicon carbide nanoelectromechanical systems

By Ya-Tang Yang, K. Ekinci, X.M.H. Huang, L. M. Schiavone, Michael L. Roukes, C. Zorman, M. Mehregany. 2001

275 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Materials Chemistry, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/337ffe0f0e3fa3c4262c19448d3b6e10fc81780c

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Electrical and Electronic Engineering

1. M. Imboden
2. P. Mohanty
3. Wayne Hiebert
4. X. Feng
5. A. Naik
6. M. S. Hanay
7. Mo Li
8. Hong X. Tang

In Materials Chemistry

1. Mo Li
2. Hong X. Tang
3. Michael L. Roukes
4. Chang Liu
5. M. Imboden
6. P. Mohanty
7. R. Rajapakse

In Mechanics of Materials

1. Chang Liu
2. R. Rajapakse

Citations in the corpus

• Dissipation in nanoelectromechanical systems (2014, background): “When adding a metal (or any other material) to a resonator, the mass loading will alter the resonance frequency [132].”
• Toward single-molecule nanomechanical mass spectrometry (2005, background): “This dry etch step removes the SiC in unprotected regions and undercuts the silicon beneath the masked SiC, resulting in a fully suspended NEMS beams [35].”
• Continuum Models Incorporating Surface Energy for Static and Dynamic Response of Nanoscale Beams (2010, background): “Several studies have fabricated nanometer scale electromechanical beam resonators and examined their responses experimentally [17]–[19].”
• Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications. (2007, methodology): “Methods Cantilever nanofabrication We fabricated nanocantilevers with surface micromachining techniques involving only two processing step”