High-Q VHF micromechanical contour-mode disk resonators

By J.R. Clark, W. Hsu, C. Nguyen. International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138), 2000

134 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/2fa5f941e633647ac6a8deed9ac0d99db5637144

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In Biomedical Engineering

1. Jan M. Rabaey
2. Alper Erturk
3. Daniel J. Inman

In Electrical and Electronic Engineering

1. Jan M. Rabaey
2. Shad Roundy
3. Alper Erturk
4. Daniel J. Inman

Citations in the corpus

• High-Q UHF micromechanical radial-contour mode disk resonators (2005, unknown): “Free space permittivity .”
• PicoRadios for wireless sensor networks: the next challenge in ultra-low power design (2002, methodology): “Passive high-Q narrow-band filters, enabled by recent advances in integratable high-Q (>1000) resonators (FBAR [3], RF-MEMS [4]), are used to suppress the noise-folding effects associated with these receivers.”
• Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications (2004, unknown): “Thus, the square resonator shape, instead of circular [6], optimally accommodates the anisotropic elasticity of singlecrystal silicon.”