Superconformal film growth: Mechanism and quantification

By Thomas P. Moffat, Daniel Wheeler, M. D. Edelstein, Daniel Josell. IBM Journal of Research and Development, 2005

337 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/2f2c650be818cbe462c658ee709f7d9d29079fb9