MEMS and Microsystems: Design and Manufacture

By T. Hsu. 2001

327 citations recorded by the source corpus.

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Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery. (2004, methodology): “In addition, several MEMS-specific techniques developed for fabricating micromechanical structures have been added to the micromachinist’s toolbox over the past 30 years [13–16].”
Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications (2007, methodology): “Currently, Si micromachining is a highly developed and excellent controllable technology [2, 3, 93].”
Carbon nanotubes, science and technology part (I) structure, synthesis and characterisation (2012, background): “The benefits of having smaller components, and hence a device with enhanced capabilities and functionalities, are obvious from the following perspectives: smaller systems tend to move more quickly than larger systems because of lower inertia of mass, the minute sizes of small devices encounter fewer”