Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery.

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Microneedle-based drug delivery systems: Microfabrication, drug delivery, and safety (2010, unknown): “Although these tools offer the potential for mass production of MNs, production is often highly specialized and includes complex multi-step processes (Zafar et al., 2004; Ziaie et al., 2004).”
3D printing: an emerging tool for novel microfluidics and lab-on-a-chip applications (2016, unknown): “Bulk micromachining is the oldest MEMS technology (Ziaie et al. 2004).”
Review of polymer MEMS micromachining (2015, background): “For additional information, the reader is also referred to [6-10] for supplementary”
Characterization of Polydimethylsiloxane (PDMS) Properties for Biomedical Micro/Nanosystems (2005, background): “Recent advances in microelectromechanical systems (MEMS) technology are providing new opportunities for a variety of biological and medical applications (Bashir, 2004; Rebello, 2004; Roy et al., 2001; Ziaie et al., 2004).”
Biology-inspired Microphysiological System Approaches to Solve the Prediction Dilemma of Substance Testing (2016, unknown): “General principles of microsystems relevant for biological applications have been described in detail (Ziaie et al., 2004).”