Pull-in voltage analysis of electrostatically actuated beam structures with fixed–fixed and fixed–free end conditions

By S. Pamidighantam, Robert Puers, K. Baert, H. Tilmans. 2002

426 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/1f1465dcb18fb155df31c18aad6ec17c2d4762f4

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In Atomic and Molecular Physics, and Optics

In Electrical and Electronic Engineering

In Mechanical Engineering

Citations in the corpus

Electromechanical Model of Electrically Actuated Narrow Microbeams (2006, neutral): “Wherease we computed results with ANSYS, those with COVENTORWARE are from [11].”
Review of modeling electrostatically actuated microelectromechanical systems (2007, methodology): “Comparisons among MEMSs based on these properties, and of fabrication methods, can be found in [1–3].”
An untethered, electrostatic, globally controllable MEMS micro-robot (2006, background): “in 1967 [13], the electromechanical analysis of cantilever snap-down has since been refined in numerous papers [14], [15], [46], [47].”
Application of the Generalized Differential Quadrature Method to the Study of Pull-In Phenomena of MEMS Switches (2007, background): “The influence of various parameters on the pull-in voltage, such as nonlinear stiffening, fringing fields [13], trapezoidal cross section [14], residual stress [15], and axial stress, has been studied.”
A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams (2005, methodology): “Several attempts have been made to develop a closed-form model to determine the pull-in voltage of a cantilever beam actuated by electrostatic force [6, 10, 11].”
Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method (2004, methodology): “The closed-form solutions for the simplified fixed–fixed and fixed–free microbeam actuators were recently derived by Pamidighantam et al [7].”
REDUCED-ORDER MODELS FOR MICROELECTROMECHANICAL RECTANGULAR AND CIRCULAR PLATES INCORPORATING THE CASIMIR FORCE (2008, background): “For a wide class of electrostatic MEMS, the deformable electrode is initially a flat body whose thickness h is much smaller than its characteristic in-plane dimension ‘, see, Pelesko and Triolo (2001).”
The pull-in behavior of electrostatically actuated bistable microstructures (2008, background): “, see [52, 53, 59] for the case of double clamped beams).”