High-resolution depth profiling in ultrathin Al2O3 films on Si

By Evgeni P. Gusev, M. Copel, Eduard A. Cartier, I. Baumvol, C. Krug, M. Gribelyuk. 2000

389 citations recorded by the source corpus.

Subfields: Computational Mechanics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/10d9065b1dbefd8a5074af53a1b503537168aebe