Parylene gas chromatographic column for rapid thermal cycling

By H. Noh, P. Hesketh, G. Frye-Mason. 2002

142 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/0d23295d2bb10e265def51de5af18116c4847f66

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In Biomedical Engineering

1. C. Wong
2. N. Rooij
3. Elisabeth Verpoorte
4. E. Furlani
5. Anne Marie Gué
6. P. Abgrall

In Electrical and Electronic Engineering

1. C. Wong
2. E. Furlani
3. Anne Marie Gué
4. P. Abgrall

Citations in the corpus

• Wafer bonding using microwave heating of parylene intermediate layers (2004, methodology): “However, recently a parylene/parylene thermal bonding technique has been developed to fabricate microchannel structures [ 10 , 11].”
• Microfluidics meets MEMS (2003, background): “presented a gas chromatographic column micromachined in parylene, a polymer exhibiting a low heat capacity and good chemical inertness [162].”
• Plasma removal of Parylene C (2008, unknown): “patterned mold and then thermocompression bonding with a second Parylene film was developed as an alternative to surface micromachining of microchannels [39, 40].”