Plasma removal of Parylene C

By Ellis Meng, Po-Ying Li, Y. Tai. 2008

158 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Cellular and Molecular Neuroscience, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/47720fc7a851cb47854d6ce1ec658871a61fc2b2

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Brian J. Kim
2. Ellis Meng

In Cellular and Molecular Neuroscience

1. Brian J. Kim
2. Ellis Meng

In Electrical and Electronic Engineering

1. Brian J. Kim
2. Ellis Meng

Citations in the corpus

• Review of polymer MEMS micromachining (2015, methodology): “Parylene is very low (1:1) and may not be optimal when etching thick Parylene layers (>10 μm) [115].”