Temperature dependence of the force sensitivity of silicon cantilevers

By U. Gysin, S. Rast, P. Ruff, E. Meyer, Dong-weon Lee, P. Vettiger, C. Gerber. 2004

163 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/071e7a2af5f0735dc27bff08402ac1939428bdb6

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Chang Q. Sun
2. M. Imboden
3. P. Mohanty

In Electrical and Electronic Engineering

1. Chang Q. Sun
2. M. Imboden
3. P. Mohanty

Citations in the corpus

• Dissipation in nanoelectromechanical systems (2014, background): “) To date, the smallest structures in which thermoelastic damping has been confirmed as a dominant source of dissipation are in the thickness range on the order of 1–2μm [160,161,152] and even at thicknesses as small as 500 nm for short beam lengths of 6μm [148].”
• Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever Heaters (2006, unknown): “where is Young’s modulus at 0 K and and are constants [ 49 ].”
• Thermo-mechanical behavior of low-dimensional systems: The local bond average approach (2009, methodology): “Temperature dependence The thermal depression of the Young’s modulus Y was attributed to anharmonic effects of the lattice vibrations [411].”