Electrical, Thermal, and Mechanical Characterization of Silicon Microcantilever Heaters

By Jungchul Lee, T. Beechem, T. L. Wright, B. Nelson, Samuel Graham, William P. King. Journal of microelectromechanical systems, 2006

211 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/b910d9ce6375ef7fffcc273d8eb2aaf71405ba92