T. Kozawa

2010–2012

A researcher in the Science corpus: 2 papers; trusts 0 researchers and is trusted by 0 researchers here, as inferred from the citation graph.

Their papers

• Resist Materials and Processes for Extreme Ultraviolet Lithography (2012) — 137 citations
• Radiation Chemistry in Chemically Amplified Resists (2010) — 266 citations