High $Q$ -Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment

By Jae-Hyeong Seo, Oliver Brand. Journal of microelectromechanical systems, 2008

156 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/cd915dc41480dc55618c15b326040e1aa971c027