Nanoimprint lithography: An alternative nanofabrication approach

By C. Torres, S. Zankovych, J. Seekamp, A. Kam, C. Cedeño, T. Hoffmann, J. Ahopelto, F. Reuther, K. Pfeiffer, G. Bleidiessel and 3 more. 2003

174 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/fc4ceef3f61d354520eec26b1dec5fc3b2278557

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In Biomedical Engineering

1. Jurriaan Huskens
2. C. Acikgoz
3. G. Vancso
4. M. Hempenius
5. Junhui He
6. Lin Yao

In Electrical and Electronic Engineering

1. Jurriaan Huskens
2. C. Acikgoz
3. G. Vancso
4. M. Hempenius
5. Lin Yao
6. Junhui He

Citations in the corpus

• Polymers in conventional and alternative lithography for the fabrication of nanostructures (2011, background): “However, the metal roughness was found to be a problem for sizes below 10 nm due to the granularity of the evaporated metal [42].”