Materials issues in microelectromechanical systems (MEMS)

By S. Spearing. 2000

628 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/fb298ba0d3bae73248d633d7f7f462e41af0db4b

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Z. Bojar
2. A. Epstein
3. Gang Wu
4. W. Polkowski
5. Chi Zhou
6. P. Jóźwik
7. Min Wei
8. Feng Zhang

In Electrical and Electronic Engineering

1. Z. Bojar
2. A. Epstein
3. Gang Wu
4. W. Polkowski
5. Chi Zhou
6. Hoang‐Phuong Phan
7. Sima Dimitrijev
8. Dzung Viet Dao

Citations in the corpus

• Millimeter-Scale, MEMS Gas Turbine Engines (2003, background): “Since these have not been considered as MEMS materials in the past, there is currently little suitable manufacturing technology available [10].”
• Strain Measurements of Silicon Dioxide Microspecimens by Digital Imaging Processing (2006, methodology): “PECVD 0.65 μm 600–1900 Tensile Tested in air and vacuum [22] Bulk SiO2 73 [ 28 ] Exp Mech”
• 3D direct writing fabrication of electrodes for electrochemical storage devices (2017, background): “A rapidly developing market for microscale devices, such as actuator drives [74], biomedical sensors [75] and micro-electromechanical systems (MEMS) [76] has attracted attention from academia.”