MEMS power generator with transverse mode thin film PZT

By Y. Jeon, R. Sood, J. Jeong, Sang-Gook Kim. 2005

883 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/f90bbcd4a930120bd80de389e0f79d3194683949

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In Electrical and Electronic Engineering

In Mechanical Engineering

Citations in the corpus

Piezoelectric thin films: an integrated review of transducers and energy harvesting (2016, background): “from an external vibrational energy source, thereby creating electrical energy via the piezoelectric effect [43].”
Piezoelectric Energy Harvesting Solutions (2014, background): “IDE micropower generator [61,62].”
An Efficient Piezoelectric Energy Harvesting Interface Circuit Using a Bias-Flip Rectifier and Shared Inductor (2009, neutral): “Full-bridge rectifiers [7], [8] and voltage doublers [5], [9] are commonly used as rectifier circuits to convert the AC output of a piezoelectric harvester into a DC voltage.”
Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power (2011, neutral): “exceed 1 kHz [24]–[34].”
A vibration energy harvesting device with bidirectional resonance frequency tunability (2008, background): “Apart from these designs, a MEMS scale piezoelectric energy harvesting cantilever has been developed [14, 15] that can have increased power density and the ability to be fabricated as an on-chip power source.”
Underwater thrust and power generation using flexible piezoelectric composites: an experimental investigation toward self-powered swimmer-sensor platforms (2011, background): “Moreover, unlike electromagnetic devices, piezoelectric devices can be fabricated both in macro-scale and micro-scale due to the well-established thick-film and thinfilm fabrication techniques [31, 32].”
A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018) (2019, methodology): “Various piezoelectric MEMS energy harvesting designs including (a) thin-film PZT cantilever (reprinted from [244], Copyright 2005, with permission from Elsevier), (b) high aspect ratio beam (reprinted from [245], Copyright 2006, with permission from Elsevier), (c) cantilever array (reprinted from [2”
Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting (2009, methodology): “For the elecrode design, two modes, such as 31 [4,5,10] and 33 [6], can be onsidered.”
A review of vibration-based MEMS piezoelectric energy harvesters (2011, background): “[19] developed a {3-3} mode thin film PZT cantilever device with inter-digitated electrodes that can generate 1.”