Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting

By D. Shen, Jung-Hyun Park, J. Noh, Song-Yul Choe, Seung-Hyun Kim, H. Wikle, Dong-Joo Kim. 2009

257 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/1d3cc0ba85e56bd2136dfd6bbfb37176c7d794b2

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Zhong Lin Wang
2. Chengkuo Lee
3. Sheng Xu
4. S. Anton
5. Mohsen Safaei
6. Henry Sodano
7. Rusen Yang
8. Yong Qin

In Electrical and Electronic Engineering

1. Zhong Lin Wang
2. Alper Erturk
3. Chengkuo Lee
4. S. Anton
5. Mohsen Safaei
6. Huicong Liu
7. Sheng Xu
8. Henry Sodano

In Mechanical Engineering

1. Zhong Lin Wang
2. Chengkuo Lee
3. Alper Erturk
4. S. Anton
5. Mohsen Safaei
6. Huicong Liu
7. Sheng Xu
8. Henry Sodano

Citations in the corpus

• A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz (2012, background): “However, most reported piezoelectric MEMS energy harvesters have high resonant frequencies (normally above 200 Hz) (Renaud et al. 2008; Liu et al. 2008; Shen et al. 2009; Elfrink et al. 2009; Lee et al. 2009; Park et al. 2010) or require high acceleration levels (normally above 1g).”
• A review on energy harvesting approaches for renewable energies from ambient vibrations and acoustic waves using piezoelectricity (2017, methodology): “The schematic of the side view of a piezoelectric energy harvesting cantilever based on a SOI wafer [41].”
• Self-powered nanowire devices. (2010, background): “7 mW cm −3 , which is 6 to 11 times that generated by a PZT cantileve”
• Underwater thrust and power generation using flexible piezoelectric composites: an experimental investigation toward self-powered swimmer-sensor platforms (2011, background): “Moreover, unlike electromagnetic devices, piezoelectric devices can be fabricated both in macro-scale and micro-scale due to the well-established thick-film and thinfilm fabrication techniques [31, 32].”
• Piezoelectric Energy Harvesting Devices: An Alternative Energy Source for Wireless Sensors (2012, unknown): “0 kΩ load; power density of 416 μW/cm3 [76]”
• A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018) (2019, methodology): “In 2009, Shen et al [247] reduced the resonant frequency of a PZT-based silicon oxide wafer cantilever harvester to below 200 Hz.”