A bulk-micromachined bistable relay with U-shaped thermal actuators

By J. Qiu, Jeffrey H. Lang, Alexander H. Slocum, Alexis C. Weber. Journal of microelectromechanical systems, 2005

137 citations recorded by the source corpus.

Subfields: Electrical and Electronic Engineering, Mechanical Engineering

View Paper: https://www.semanticscholar.org/paper/5088b4cc4e1afc334d1c20cb3cd528f36eca1646

Citations in the corpus

• Nonlinear Dynamics of MEMS Arches Under Harmonic Electrostatic Actuation (2010, unknown): “[1], magnetic [6]–[8], thermal [9], [10], comb-drive electrosta-”