Characterization of TiNi shape-memory alloy thin films for MEMS applications

By Y. Fu, Wenyi Huang, H. Du, Xu Huang, J. Tan, Xiangyang Gao. 2001

202 citations recorded by the source corpus.

Subfields: Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/f892bc058b44f9e3a37fa63f63b3050803dba2f1

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Materials Chemistry

1. Sam Zhang
2. Wenyi Huang
3. Mohsen Asghari
4. J. Musil
5. E. Taati

Citations in the corpus

• TiNi-based thin films in MEMS applications: a review (2004, background): “More recently, thin film SMA has been recognized as a promising and high performance material in the field of micro-electro-mechanical system (MEMS) applications, since it can be patterned with standard lithography techniques and fabricated in batch process [4–8].”