Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

By M. Akiyama, T. Kamohara, K. Kano, Akihiko Teshigahara, Y. Takeuchi, Nobuaki Kawahara. Advances in Materials, 2009

896 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Condensed Matter Physics, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/f76f9fc0e0469e0d6d41e85dcc50bf0c283c727e

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In Biomedical Engineering

1. Songbin Gong

Citations in the corpus

• A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4% (2020, background): “costly substrates [11]–[14], new materials with larger piezoelectric coefficients [15]–[20], and incorporating additional lumped elements or transmission lines [21]–[23].”