A1 Resonators in 128° Y-cut Lithium Niobate with Electromechanical Coupling of 46.4%

By Ruochen Lu, Yansong Yang, Steffen Link, Songbin Gong. Journal of microelectromechanical systems, 2020

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In this work, we present first-order antisymmetric (A1) mode resonators in 128° Y-cut lithium niobate (LiNbO₃) thin films with electromechanical coupling coefficients (<inline-formula> <tex-math notation="LaTeX">$k^{2}$ </tex-math></inline-formula>) as large as 46.4%, exceeding the state-of-the-art. The achievable <inline-formula> <tex-math notation="LaTeX">$k^{2}$ </tex-math></inline-formula> of A1 in LiNbO₃ substrates of different orientations is first explored, showing X-axis direction in 128° Y-cut LiNbO₃ among the optimal combinations. Subsequently, A1 resonators with spurious mode mitigation are designed and fabricated. In addition to the large <inline-formula> <tex-math notation="LaTeX">$k^{2}$ </tex-math></inline-formula>, the implemented devices show a maximum quality factor (<inline-formula> <tex-math notation="LaTeX">$Q$ </tex-math></inline-formula>) of 598 at 3.2 GHz. Upon further optimization, the reported platform can potentially deliver a wideband acoustic-only filtering solution in 5G New Radio. [2020–0003]

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Materials Chemistry

View Paper: https://www.semanticscholar.org/paper/d43dfc419daca05bd7bb9de3959383edeafc0fd7