An accurate semi‐empirical equation for sputtering yields I: for argon ions

By M. Seah, C. Clifford, F. Green, I. Gilmore. 2005

134 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Computational Mechanics, Mechanics of Materials

View Paper: https://www.semanticscholar.org/paper/f5e809e234889753319c21b429bb376e2a874f2b