Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM

By Takahiro Namazu, Y. Isono, Takeshi Tanaka. Journal of microelectromechanical systems, 2000

384 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/f0c0979dcff60c083b8776b210b6addc663745bb

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Harold S. Park
2. Patrick A. Klein
3. P. Sharma
4. P. Chhapadia
5. P. Mohammadi
6. Ju Li
7. Liying Jiang
8. Zhi Yan

In Biomedical Engineering

1. Harold S. Park
2. Patrick A. Klein

In Electrical and Electronic Engineering

1. Harold S. Park
2. Patrick A. Klein

Citations in the corpus

• Surface stress effects on the resonant properties of metal nanowires: The importance of finite deformation kinematics and the impact of the residual surface stress (2008, background): “, 2006) to AFM-induced bending (Wong et al., 1997; Wu et al., 2005; Heidelberg et al., 2006; Cuenot et al., 2004; Jing et al., 2006; Hoffmann et al., 2006; Chen et al., 2006; Namazu et al., 2000; Sundararajan et al., 2002) or resonance measurements (Verbridge et al.”
• What is the Young's Modulus of Silicon? (2010, neutral): “See, for example, [19]–[21].”
• Size effect: Influence of proximity of fracture process zone to specimen boundary (2007, result): “The relevance of surface and boundary influence on size effect is even more obvious for micro- and nanofracture as shown by some recent studies [15–17].”