Optical MEMS for Lightwave Communication

By Ming C. Wu, Olav Solgaard, Joseph E. Ford. Journal of Lightwave Technology, 2006

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Large-scale silicon photonic switches with movable directional couplers (2015, methodology): “The crossing waveguides form the backbone of a low-loss optical crossbar network, which is architecturally similar to the free-space 2D MEMS switches [31] but now integrated on silicon with much higher density.”
Optical MEMS: From Micromirrors to Complex Systems (2014, background): “Whereas the field of optical MEMS initially relied strongly on electrostatic actuation for mechanical movement or positioning of microoptical components [34], the spectrum of actuation techniques has greatly expanded.”
MEMS Laser Scanners: A Review (2014, background): “It is the first review of its kind, but a few earlier reviews have partly treated the same topic [11], [36], [37].”
Review on Micro- and Nanolithography Techniques and Their Applications (2012, background): “Optical switches [116-119], optical attenuators [120], optical data modulators, filters,”
Dispersion Trimming in a Reconfigurable Wavelength Selective Switch (2008, background): “Research in optical microelectromechanical systems (MEMS) is making progress in many of these areas, though a different MEMS device is still required for each function [2].”
A nanoelectromechanical tunable laser (2008, methodology): “3" language="eng" publish="issue" relation="no" origsrc="yes"> A wavelength-tunable semiconductor laser has been constructed by combining an optical microelectromechanical (MEM) mirro”