Optical MEMS: From Micromirrors to Complex Systems

By Olav Solgaard, A. Godil, R. Howe, Luke P. Lee, Y. Peter, H. Zappe. Journal of microelectromechanical systems, 2014

162 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/c439e8b473d63067288e1711be522e45cef922f7