A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists

By Y. Chuang, F. Tseng, Jen-Hau Cheng, Wei-Keng Lin. 2003

159 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/edb64a9acc9f0cd548ca8e027734db2bcf6d2c1a

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Aaron J. Fleischman
2. A. Mata
3. Shuvo Roy
4. Brian J. Kim
5. Ellis Meng

Citations in the corpus

• Fabrication of multi-layer SU-8 microstructures (2006, background): “This non-uniform exposure through the SU-8 layer could result from increased absorption of ultraviolet (UV) light with increasing thickness of the SU-8 layer, which, in turn, would result in intensity variations and associated differences in reflection characteristics from the underlying wafer surfa”