Fabrication of circular optical structures with a 20 nm minimum feature size using nanoimprint lithography

By Mingtao Li, J. Wang, L. Zhuang, Stephen Y. Chou. 2000

137 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/e590fc7bd185bdfc0cce926810e7fc6f3a26b2be

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Biomedical Engineering

1. Jurriaan Huskens
2. C. Acikgoz
3. G. Vancso
4. M. Hempenius
5. Junhui He
6. Lin Yao

In Electrical and Electronic Engineering

1. Jurriaan Huskens
2. C. Acikgoz
3. G. Vancso
4. M. Hempenius
5. Lin Yao
6. Junhui He

Citations in the corpus

• Polymers in conventional and alternative lithography for the fabrication of nanostructures (2011, background): “This process has been extended to pattern components for a range of microelectronics, optical, and optoelectronic devices [61].”