A novel MEMS pressure sensor fabricated on an optical fiber

By D. Abeysinghe, S. Dasgupta, J. Boyd, H. Jackson. IEEE Photonics Technology Letters, 2001

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Miniature fiber-optic pressure sensor (2005, methodology): “Miniature fiber-optic sensors based on Fabry‐Perot (F-P) interferometry have been reported using various approaches [3]‐[ 5 ].”
Fixed-wing MAV attitude stability in atmospheric turbulence—Part 2: Investigating biologically-inspired sensors (2014, background): “There are also various other variants studied (Abeysinghe et al., 2001, Chih-Wei et al., 2012, Reck et al., 2011).”
Pressure sensor based on the fiber-optic extrinsic Fabry-Perot interferometer (2011, background): “Various kinds of DEFPI-based fiber optic sensors, such as silica diaphragm spliced with silica capillary [53, 54], glass or silicon diaphragm bonded to silicon base [55], and dipped polymer membrane on hollow fiber tip [22] have been developed and applied in the detection of hydroacoustic waves and ”
Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review (2014, methodology): “Pressure sensors with diaphragms utilizing optical fibres have also been suggested in literature (abeysinghe et al. 2001; Zhu and wang 2005; Xu et al. 2005).”