Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review

By Surender Kumar, B. D. Pant. Microsystem Technologies, 2014

243 citations recorded by the source corpus.

Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/8ed3628c7cebd57aebb60c26fea743a97cb01fb0

How researchers see this paper

The researchers whose trusted networks rank it highest, strongest advocate first. Every researcher gets a different order.

In Atomic and Molecular Physics, and Optics

1. Nam-Trung Nguyen

In Biomedical Engineering

1. Dzung Viet Dao
2. Nam-Trung Nguyen

In Electrical and Electronic Engineering

1. Hoang‐Phuong Phan
2. Sima Dimitrijev
3. Dzung Viet Dao
4. K. Nakamura
5. Nam-Trung Nguyen
6. Jeff Morse

Citations in the corpus

• The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review (2015, methodology): “The piezoresistive effect has also been applied in various Micro Electro Mechanical Systems (MEMS) sensors, utilizing its advantages such as device miniaturization, low power consumption and simple readout circuit [2], [3], over other sensing mechanisms (optical, electro static, piezoelectric).”