Three‐Dimensional Nanostructures for Photonics
By G. von Freymann, A. Ledermann, Michael Thiel, Isabelle Staude, S. Essig, Kurt Busch, M. Wegener. 2010
336 citations recorded by the source corpus.
Subfields: Atomic and Molecular Physics, and Optics, Biomedical Engineering, Surfaces, Coatings and Films
View Paper: https://www.semanticscholar.org/paper/dd24b62798f359b84e5d8e622f2cd7f37eb99e7f
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In Atomic and Molecular Physics, and Optics
In Biomedical Engineering
Citations in the corpus
- New Generation Electron Beam Resists: A Review (2017, background): “3D devices find applications in a large number of fields including photonic crystals, biosensors and metamaterials.(80,81,82) Especially the devices that are fabricated with the EBL technique require multiple steps and precise alignment of different layers.”
- Resonant dielectric nanostructures: a low-loss platform for functional nanophotonics (2016, background): “writing [172, 173], either directly into a high-index photosensitive material [174] or in combination with a subsequent inversion [175] or double-inversion [176, 177] procedure to”