New Generation Electron Beam Resists: A Review

By Anushka S. Gangnaik, Y. Georgiev, Justin D. Holmes. 2017

168 citations recorded by the source corpus.

Subfields: Biomedical Engineering, Electrical and Electronic Engineering

View Paper: https://www.semanticscholar.org/paper/9e3063357f998dfc9e9ef55223fffb344b9b1db3